Liubich, Vlad : rechercher sur Z-Library

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1

Two-layer critical dimensions and overlay process window characterization and improvement in full-chip computational lithography

Sturtevant, John L., Liubich, Vlad, Gupta, Rachit

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2016

Langue:

english

Fichier:

PDF, 5.38 MB

english, 2016

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Optical Microlithography XXIX - A novel full chip process window OPC based on matrix retargeting

Erdmann, Andreas, Kye, Jongwook, Zhang, Xima, Yu, Zhitang, Liu, Qingwei, Shen, Xuan, Zhang, Liguo, Hong, Le, Liubich, Vlad, Lippincott, George, Zhu, Cynthia, Word, James

Année:

2016

Langue:

english

Fichier:

PDF, 465 KB

english, 2016

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 24 February 2013)] Optical Microlithography XXVI - Introducing a novel flow to estimate challenges encountered while transitioning from RET development to manufacturable solution

Cheng, Jacky, Conley, Will, Chia, Robin, Gong, Ying, ElSewefy, Omar, Chua, GekSoon, Foong, YeeMei, Dave, Aasutosh, Chua, Alvin, Zhang, DongQing, Liubich, Vlad, Lacour, Pat, Tritchkov, Alex

Année:

2013

Langue:

english

Fichier:

PDF, 667 KB

english, 2013

4

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, California, United States (Tuesday 29 September 2015)] Photomask Technology 2015 - Characterization and mitigation of relative edge placement errors (rEPE) in full-chip computational lithography

Hayashi, Naoya, Kasprowicz, Bryan S., Sturtevant, John, Gupta, Rachit, Shang, Shumay, Liubich, Vlad, Word, James

Année:

2015

Langue:

english

Fichier:

PDF, 1.37 MB

english, 2015

5

Sign of the interaction parameter in disordered Fe–Al alloys

Simon Dorfman, David Fuks, Vlad Liubich

Journal:

International Journal of Quantum Chemistry

Année:

1998

Langue:

english

Fichier:

PDF, 279 KB

english, 1998

6

Ab initio study of energy parameters in DO3 phase of Fe–Al alloy

Simon Dorfman, Vlad Liubich, David Fuks

Journal:

International Journal of Quantum Chemistry

Année:

1999

Langue:

english

Fichier:

PDF, 1.10 MB

english, 1999

7

Interstitial boron in tungsten: Electronic structure, ordering tendencies, and total energy calculations

Vlad Liubich, David Fuks, Simon Dorfman

Journal:

International Journal of Quantum Chemistry

Année:

1999

Langue:

english

Fichier:

PDF, 477 KB

english, 1999

8

Relaxation of atoms in the tungsten Σ3(111) grain boundary with and without boron interstitials

Kleber C Mundim, Vlad Liubich, Simon Dorfman, Joshua Felsteiner, David Fuks, Gunnar Borstel

Journal:

Solid State Communications

Année:

2001

Langue:

english

Fichier:

PDF, 103 KB

english, 2001

9

Nonempirical simulations of boron interstitials in tungsten

Kleber C. Mundim, Vlad Liubich, Simon Dorfman, Joshua Felsteiner, David Fuks, Gunnar Borstel

Journal:

Physica B: Condensed Matter

Année:

2001

Langue:

english

Fichier:

PDF, 356 KB

english, 2001

10

Thermodynamic factor in interdiffusion in Fe-Al alloys from the diffuse X-ray scattering

Vlad Liubich, Simon Dorfman, David Fuks, Helmut Mehrer

Journal:

Materials Science and Engineering: A

Année:

1998

Langue:

english

Fichier:

PDF, 61 KB

english, 1998

11

Site preference occupation of Ti, Ni, and Cr in Fe3Al compound

David Fuks, Simon Dorfman, Vlad Liubich, Larisa Kutsenko

Journal:

International Journal of Quantum Chemistry

Année:

2002

Langue:

english

Fichier:

PDF, 322 KB

english, 2002

12

Non-empirical study of phase competition in A2–B2 mixture in Fe–Al alloy

Vlad Liubich, Simon Dorfman, David Fuks

Journal:

Computational Materials Science

Année:

2002

Langue:

english

Fichier:

PDF, 99 KB

english, 2002

13

Sliding and decohesion of Σ[sub 3]〈111〉 grain boundary in tungsten: Monte Carlo simulations with many-body ab initio potentials

Dorfman, Simon, Mundim, Kleber C., Liubich, Vlad, Fuks, David

Journal:

Journal of Applied Physics

Année:

2001

Langue:

english

Fichier:

PDF, 575 KB

english, 2001

14

Site Preference Occupation of Co and Mn in Fe3Al-Based Alloys

Fuks, David, Dorfman, Simon, Liubich, Vlad, Kutsenko, Larisa

Journal:

Materials Science Forum

Année:

2003

Fichier:

PDF, 377 KB

2003

15

Site Preference Occupation of Ni and V in Fe3Al-Based Alloys

Fuks, David, Dorfman, Simon, Liubich, Vlad, Kutsenko, Larisa, Mehrer, Helmut

Journal:

Materials Science Forum

Année:

2005

Langue:

english

Fichier:

PDF, 379 KB

english, 2005

16

Simulations of decohesion and slip of the Σ 3 ⟨111⟩ grain boundary in tungsten with non-empirically derived interatomic potentials: the influence of boron interstitials

Dorfman, Simon, Liubich, Vlad, Fuks, David, Mundim, Kleber C

Journal:

Journal of Physics Condensed Matter

Année:

2001

Langue:

english

Fichier:

PDF, 609 KB

english, 2001

17

NONEMPIRICAL SIMULATIONS OF Σ 3 < 111> TUNGSTEN GRAIN BOUNDARY WITH BORON ATOMS

FUKS, DAVID, MUNDIM, KLEBER, LIUBICH, VLAD, DORFMAN, SIMON

Journal:

Surface Review and Letters

Année:

1999

Langue:

english

Fichier:

PDF, 816 KB

english, 1999

18

Determination of the thermodynamic factor for the B2 FeAl phase from X-ray diffuse scattering data

Liubich, Vlad, Dorfman, Simon, Fuks, David, Mehrert, Helmut

Journal:

MRS Proceedings

Année:

1998

Langue:

english

Fichier:

PDF, 701 KB

english, 1998

19

Thermodynamic Factor Evaluated from Diffuse X-ray Scattering

Liubich, Vlad, Dorfman, Simon, Fuks, David, Mehrer, Helmut

Journal:

Materials Transactions, JIM

Année:

1999

Fichier:

PDF, 742 KB

1999